AERA品牌FC-261E进口气体质量流量计控制器一年保期热卖

AERA品牌FC-261E进口气体质量流量计控制器一年保期热卖

As the field-proven standard for a range of applications, Hitachi Metal’s Aera? FC-R7700 series delivers Economical, analog control, elastomer-sealed model.
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
This unit is compliant for EU-Rohs Directive.
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 series is cost-effective, low noise and low power consumption.
Easy Integration
This models feature standard electrical connectors and critical dimensions to easily fit in the existing systems with lower noise and lower power consumption than the case of digital model.
Fast Response
Advances in the FC-R7700 series’ technical design delivery enhanced performance compared to competing mass flow controllers (MFCs). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FCR7700 series provides a flexibility for many applicable needs and produce a settling time of ≤ 2 sec. between set points. (≤ 3sec. for FC-R7720CD/FC-R7720D)
Unsurpassed Reliability
The usage of less number of the eletric devices than the case of digital model and no usage of the DC-DC converter results the highly- reliable performance in a long-term.

Aera? FC-R7700 series
Physical FC-R7700CD/FC-R7700D Series FC-R7710CD/FC-R7710D Series FC-R7720CD/FC-R7720D Series
Control Valve Type Normally-open or normally-closed solenoid
External seals Fluoroelastomer or Chloroprene Rubber
Materials
Stainless-steel type  316L, 316, PTFE, Magnetic Stainless, Fluoro Rubber, Chloroprene Rubber*
Stainless-steel type 316(L), PTFE, Magnetic Stainless, Fluoro Rubber, Chloroprene Rubber, PCTFE** Standard Fittings 1/4" VCR?, 1/4" Swagelok? compatible 1/4" VCR?, 3/8"VCR?, 1/4" Swagelok?, 3/8" Swagelok? Orientation May be mounted in any position
Mass 1.0 kg (2.2 lb) 2.8kg (6.2lb)
Electrical FC-R7700CD/FC-R7700D Series FC-R7710CD/FC-R7710D Series FC-R7720CD/FC-R7720D Series Input Power +15 VDC ±2%, 25 mA -15 VDC ±2%, 180 mA +15 VDC ±2%, 25 mA -15 VDC ±2%, 220 mA Power Consumption 3.1 W max 3.7 W max
Input Command Signal 0 to 5 VDC Input impedance > 1M? Output signal 0 to 5 VDC Load impedance > 2k?
Operational FC-R7700CD/FC-R7700D Series FC-R7710CD/FC-R7710D Series FC-R7720CD/FC-R7720D Series
Full-Scale Range 10 SCCM to 5 SLM
N/O: 6 to 20 SLM* N/C： 6 to 50 SLM** 35 to 200 SLM Response Time ≤ 2 sec. to within ±2% of full scale 0→***, SEMI E17-91 ≤ 3 sec. to within ±2% of full scale 0→***, SEMI E17-91 Flow Accuracy with calibration gas @22°C ±3°C, Zero <±0.1% FS ≤ ±1% of full scale ≤ ±2% of full scale Linearity ≤ ± 0.5% of full scale ≤ ± 0.5% of full scale1 ≤ ±1% of full scale Repeatability ≤ ± 0.2% of full scale Leak Integrity 1x10-6  atm-cc/sec (He) max; 1x10-7  Pa?m3 /sec (He) max Flow Control Range 2 to *** of full scale2
Normal operating Pressure 49 to 275kPaD
69 to 275kPaD* 69 to 275kPaD**
145 to 275kPaD3
Maximum Operating Pressure 490kPaG
Proof Pressure 1MPaG
Operating Temperature Range 5 to 45°C (41 to 113°F) Gas temperature needs to be the same as the atmospheric temperature.
* N/O: Normally Open Valve Model,  ** N/C: Normally Closed Valve Model [20SLM* Fluoro Rubber or Chloroprene Rubber is used in case that the N2 density flow is 11.096SLM or greater with normally open valve model and the material depends on the applied gas. Contact us to see what material is applied. Fluoro Rubber or Chloroprene Rubber is used in case that the N2 density flow is 551SCCM or greater with normally closed valve model and the material depends on the applied gas. Contact us to see what material is applied. ** The material depends on the applied gas. Contact us to see whether Fluoro Rubber or out of this material(stainless steel 316, PCTFE) is used.
Speci? cations
Electrical Connections
Pin 1 Pin 5 #4-40UNC
Pin 6 Pin 9
9-Pin D-sub, pin contact connector
1 VALVE OPEN/CLOSE* 2 OUTPUT(DC 0～5V/0-***)
3 POWER DC +15V
4 COMMON 5 POWER DC -15V 6 CONTROL (DC 0～5V/0-***)
7 COMMON
8 COMMON 9 VALVE TEST PT.(DC 0～-13V) * Connection to +15V OPEN, Connection to -15V : CLOSE (Normally closed valve model) Connection to +15V CLOSE, Connection to -15V : OPEN (Normally open valve model)

The products and their specifications are subject to change without notice.   Please check the latest catalog, technical documents or specifications before your final design,   procurement or use of the products. ?Aera? are trademarks of Hitachi Metals Ltd.. ?Swagelok? and VCR? are trademarks of Swagelok Company Corporation.
Hitachi Metals Ltd. Is not responsible for the following troubles and damages. ?Troubles or damages caused by natural disaster or inevitable accident, caused by mishandling,   use or storage in an improper place, use out of the rated specifications and modification,   factors contamination and clog due to use of corrosive gas and reactive gas. ?Any trouble or damage that is outside of Hitachi Metals Ltd.’s control has no responsibility   (if it does not clarify where responsibility lies, warranty is to be determined whether or not   it costs regardless of the warranty period after deliberation.
Before using any of the products introduced in this catalog, please read the respective user manuals thoroughly. Safety Precaution
Model and Suf? x Codes
Dimensions
Category Description Suffix Codes Product Type Mass flow controller FC- … … … … … … … RoHS Compliance Compliant with RoHS directives … R … … … … … …
Full-Scale Range
10 SCCM to 5 SLM … … 7700 … … … … … 6 to 50 SLM … … 7710 … … … … … 35 to 200 SLM … … 7720 … … … … …
Control Valve
Normally-closed … … … C … … … … Normally-open … … … (Blank) … … … … Connector Aera? 9-Pin D … … … … D … … …
Fittings
1/4” VCR? compatible … … … … … 4V … … 3/8” VCR? compatible (772x series only) … … … … … 6V … … 1/4” Swagelok? compatible … … … … … 4S … … 3/8” Swagelok? compatible (772x series only) … … … … … 6S … … Gas Type of gas … … … … … … N2 … Flow Flow range of gas (SCCM or SLM) … … … … … … … 200 Single-Gas Example FC- R 7700 C D 4V N2 200 SCCM (MFC, RoHS compliant, 9-pin D connector, normally-closed valve, 1/4” VCR? fittings, N2 gas, 200 SCCM full-scale range)
FC-R7700CD/ FC-R7700D Series
FC-R7710CD/ FC-R7710D Series
FC-R7720CD/ FC-R7720D Series
A 12.7 mm (0.5") 12.7 mm (0.5") 15.0 mm (0.6")
B 76.0 mm (3.0") 78.5 mm (3.09") 133.5 mm (5.3")
C 124.0 mm (4.9") 124.0 mm (4.9")
1/4” VCR fittings: 184.3 mm (7.2")
3/8" VCR fittings: 192.5 mm (7.6")
D 18.3 mm (0.72") 18.3 mm (0.72") 25.5 mm (1.0")
E 69.0 mm (2.7") 69.0 mm (2.7") 101.5 mm (4.0") F 119.0 mm (4.7") 119.0 mm (4.7") 140.5 mm (5.5") G 125.0 mm (4.92") 125.0 mm (4.92") 144.5 mm (5.7")
H 32.0 mm (1.3") 32.0 mm (1.3") 38 mm (1.5")
I 3.5 mm (0.2") 3.5 mm (0.14") 16 mm (0.63")

本店专门经营进口气体质量流量计销售，***美国进口，全套校准证书，一年质保期。

本公司专业销售质量流量计近40年，具有丰富的销售和售后服务经验，我们有专业的服务团队和专业工程师对产品进行跟踪服务。

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店主:邹积坤

电话:13050393336

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