是否进口:是 | 原产国/地区:日本 | 加工定制:否 |
品牌:AERA | 型号:TYLAN | 类型:质量流量计 |
测量范围:0-30m3/h | 订货号:001 | 货号:001 |
精度等级:1% | 公称通径:1/4mm | 适用介质:GAS |
工作压力:10MPa | 工作温度:23℃ | 规格:B-1 |
是否跨境货源:是 | 主要下游平台:其他 | 主要销售地区:东南亚 |
有可授权的自有品牌:否 |
AERA进口FC-D980C气体质量流量计
AERA进口FC-D980C气体质量流量计
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 series is both cost-effective and precise.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with no installation hassles. Certain models feature standard electrical connectors and critical dimensions to easily fit existing systems.
AERA***FC-D980C气体质量流量计
Full-Scale Range 10 sccm to 5 slm
N/O: 6 to 20 slm* N/C : 6 to 50 slm** 35 to 200 slm Response Time<2 sec to within ±2% of full scale <3 sec to within ±2% of full scale Accuracy ≤ ±1% of full scale ≤ ±2% of full scale Linearity ≤ ± 0.5% of full scale ≤ ± 0.5% of full scale1 ≤ ±1% of full scale Repeatability ≤ ± 0.2% of full scale Leak Integrity 1x10-6 atm-cc/sec (He) max; 1x10-7 Pa?m3 /sec (He) max Control Range 2 to *** of full scale2
Differential Pressure 7 to 40 psiD
10 to 40 psiD 14 to 40 psiD
21 to 40 psiD3
Normal Operating Pressure 70 psig
Maximum Inlet Pressure 140 psig
Temperature Range 5 to 45°C (41 to 113°F)
* N/O: Normally Open Valve Model, ** N/C: Normally Closed Valve Model 1: Less than ±1% for Full Scale Flow greater than 30SLM 2: 5~*** for Full Scale Flow greater than 150SLM 3: 28~43 psiD for Full Scale Flow greater than 150SLM
Fast Response
Advances in the FC-R7700 series’ technical design delivery enhanced performance compared to competing mass flow controllers (MFCs). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FCR7700 series provides a fast response time. These speed enhancements minimize over-shoot and undershoot, and produce an actual-flow settling time of<2 sec between set points.
Unsurpassed Reliability
With over 40,000 units delivered in FC-7800CD series MFCs,<0.5% are returned within a year of shipment.
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 series is both cost-effective and precise.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with no installation hassles. Certain models feature standard electrical connectors and critical dimensions to easily fit existing systems.
AERA进口FC-7700CD气体质量流量计
本店专门经营进口气体质量流量计销售,***美国进口,全套校准证书,一年质保期。
本公司专业销售质量流量计近40年,具有丰富的销售和售后服务经验,我们有专业的服务团队和专业工程师对产品进行跟踪服务。
具体产品参数,价格请询价
店主:邹积坤
电话:13050393336
关于本产品:我们提供全套校准认证书,一年的质保服务。全套认证报告提供,我们有不同气体量程的规格的流量计。
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